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專任教師
張晉愷Chin-Kai Chang
職  稱
助理教授
學  歷
Ph.D., Institute of Applied Mechanics, National Taiwan University, 2009
電  話
62179
研 究 室
教授室:91615 實驗室:91909
專  長
奈米光學、微奈米製造技術、光學機構系統
簡要經歷
Education 
Ph.D. Institute of Applied Mechanics, National Taiwan University, 2009/07.
B.S. Mechanical Engineering, National Taiwan University, 2004/06.

Experiences
Material and Chemical Research Laboratories, Industrial Technology Research Institute, 2009/09~2013/09
Functional Materials and Devices, Department of Chemical Engineering and Chemistry, Eindhoven University of Technology, Netherlands, 2011/09~2012/04
Nano Patterning Technology Division, Taiwan Semiconductor Manufacturing Company, 2013/09~2020/02
Department of Mechanical Engineering, National Cheng Kung University, 2020/02~
學術專長
Optical metrology, Nano-Fabrication, Opto-Mechanical Systems, Nano-Optics
研究領域
Metalens, Plasmonic Optics, Lithography, Micro/Nano-Fabrication Technology
主要授課課程
Mechanics of Materials (1)
Introduction to Computers

Experiments in Mechanical Engineering (2)
Introduction to Electromagnetism
Processing Technology and Equipment for Advanced Semiconductor Manufacturing

著作發表
Recent 5 years

Peer-Reviewed Journals (* corresponding author)


1. C. K. Chang*, R. W. Hsu, and D. Z. Lin, “Enhancement of focusing properties of Bessel-like beam by metallic surface nanostructure”. Applied Physics Express 15, 072001 (2022). (IF 2.82, Rank 48.4% in Applied Physics)
2. C. K. Chang*, and W. T. Yeh, “Beaming effect of the plasmonic metalens structured with concentric elliptical nanohole arrays”. Optical Materials 134, 113084 (2022). (IF 3.75, Rank 28.7% in Optics)
3. C. K. Chang*, and C. H. Wei, “Polarization-switchable focal vortex beam by an Archimedean array”. Optics Express 31(6), 9915~9922 (2023). (IF 3.83, Rank 27.7% in Optics)
4. C. K. Chang*, and W. T. Yeh, “Wavefront engineering based on hybrid plasmonic mode”. Optics and Lasers in Engineering 167, 107605 (2023). (IF 5.67, Rank 17.8% in Optics)

5. C. K. Chang*, and T. H. Huang, “Enhancement of photothermal effect using a hierarchical plasmonic structure”. Applied Surface Science 638, 158034 (2023). (IF 7.39, Rank 5% in Materials Science, Coatings and Films)
6. C. K. Chang*, and H. Y. Chien, “
Improvements in patterning quality and fidelity in plasmonic lithography incorporating optical proximity correction”. Optics and Laser Technology 174, 110653 (2024). (IF 5.00, Rank 18% in Optics)
7. C. K. Chang*, and C. W. Yang, “Retrieving profile of photoresist with high aspect ratio and subwavelength features using optical spectroscopy and artificial neural network”. Optics Express 32(5), 8389-8396 (2024). (IF 3.8, Rank 30% in Optics)

Conference Papers (* corresponding author)

C. H. Wei, and C. K. Chang*, “Generation of optical vortex by plasmonic metalens for beam shaping,” The 12th International Conference on Metamaterials, Photonic Crystals and Plasmonics (META 2022), Paper ID 1738, Torremolinos, Spain (19-22 July 2022).