專任教師
張晉愷Chin-Kai Chang
職 稱
副教授
學 歷
國立台灣大學應用力學研究所 博士
電 話
62179
研 究 室
辦公室: 91615 實驗室: 91909
專 長
奈米光學、微奈米製造技術、光學機構系統
簡要經歷
Education
Ph.D. Institute of Applied Mechanics, National Taiwan University, 2009/07.
Ph.D. Institute of Applied Mechanics, National Taiwan University, 2009/07.
B.S. Mechanical Engineering, National Taiwan University, 2004/06.
Experiences
Material and Chemical Research Laboratories, Industrial Technology Research Institute, 2009/09~2013/09
Functional Materials and Devices, Department of Chemical Engineering and Chemistry, Eindhoven University of Technology, Netherlands, 2011/09~2012/04
Nano Patterning Technology Division, Taiwan Semiconductor Manufacturing Company, 2013/09~2020/02
Department of Mechanical Engineering, National Cheng Kung University, 2020/02~
Experiences
Material and Chemical Research Laboratories, Industrial Technology Research Institute, 2009/09~2013/09
Functional Materials and Devices, Department of Chemical Engineering and Chemistry, Eindhoven University of Technology, Netherlands, 2011/09~2012/04
Nano Patterning Technology Division, Taiwan Semiconductor Manufacturing Company, 2013/09~2020/02
Department of Mechanical Engineering, National Cheng Kung University, 2020/02~
學術專長
Optical metrology, Nano-Fabrication, Opto-Mechanical Systems, Nano-Optics
研究領域
Metalens, Plasmonic Optics, Lithography, Micro/Nano-Fabrication Technology
主要授課課程
Mechanics of Materials (1)
Introduction to Computers
Experiments in Mechanical Engineering (2)
Introduction to Electromagnetism
Processing Technology and Equipment for Advanced Semiconductor Manufacturing
Introduction to Computers
Experiments in Mechanical Engineering (2)
Introduction to Electromagnetism
Processing Technology and Equipment for Advanced Semiconductor Manufacturing
著作發表
Recent 5 years
Peer-Reviewed Journals (* corresponding author)
1. C. K. Chang*, R. W. Hsu, and D. Z. Lin, “Enhancement of focusing properties of Bessel-like beam by metallic surface nanostructure”. Applied Physics Express 15, 072001 (2022). (IF 2.82, Rank 48.4% in Applied Physics)
2. C. K. Chang*, and W. T. Yeh, “Beaming effect of the plasmonic metalens structured with concentric elliptical nanohole arrays”. Optical Materials 134, 113084 (2022). (IF 3.75, Rank 28.7% in Optics)
3. C. K. Chang*, and C. H. Wei, “Polarization-switchable focal vortex beam by an Archimedean array”. Optics Express 31(6), 9915~9922 (2023). (IF 3.83, Rank 27.7% in Optics)
4. C. K. Chang*, and W. T. Yeh, “Wavefront engineering based on hybrid plasmonic mode”. Optics and Lasers in Engineering 167, 107605 (2023). (IF 5.67, Rank 17.8% in Optics)
5. C. K. Chang*, and T. H. Huang, “Enhancement of photothermal effect using a hierarchical plasmonic structure”. Applied Surface Science 638, 158034 (2023). (IF 7.39, Rank 5% in Materials Science, Coatings and Films)
6. C. K. Chang*, and H. Y. Chien, “Improvements in patterning quality and fidelity in plasmonic lithography incorporating optical proximity correction”. Optics and Laser Technology 174, 110653 (2024). (IF 5.00, Rank 18% in Optics)
7. C. K. Chang*, and C. W. Yang, “Retrieving profile of photoresist with high aspect ratio and subwavelength features using optical spectroscopy and artificial neural network”. Optics Express 32(5), 8389-8396 (2024). (IF 3.8, Rank 30% in Optics)
Conference Papers (* corresponding author)
C. H. Wei, and C. K. Chang*, “Generation of optical vortex by plasmonic metalens for beam shaping,” The 12th International Conference on Metamaterials, Photonic Crystals and Plasmonics (META 2022), Paper ID 1738, Torremolinos, Spain (19-22 July 2022).
Peer-Reviewed Journals (* corresponding author)
1. C. K. Chang*, R. W. Hsu, and D. Z. Lin, “Enhancement of focusing properties of Bessel-like beam by metallic surface nanostructure”. Applied Physics Express 15, 072001 (2022). (IF 2.82, Rank 48.4% in Applied Physics)
2. C. K. Chang*, and W. T. Yeh, “Beaming effect of the plasmonic metalens structured with concentric elliptical nanohole arrays”. Optical Materials 134, 113084 (2022). (IF 3.75, Rank 28.7% in Optics)
3. C. K. Chang*, and C. H. Wei, “Polarization-switchable focal vortex beam by an Archimedean array”. Optics Express 31(6), 9915~9922 (2023). (IF 3.83, Rank 27.7% in Optics)
4. C. K. Chang*, and W. T. Yeh, “Wavefront engineering based on hybrid plasmonic mode”. Optics and Lasers in Engineering 167, 107605 (2023). (IF 5.67, Rank 17.8% in Optics)
5. C. K. Chang*, and T. H. Huang, “Enhancement of photothermal effect using a hierarchical plasmonic structure”. Applied Surface Science 638, 158034 (2023). (IF 7.39, Rank 5% in Materials Science, Coatings and Films)
6. C. K. Chang*, and H. Y. Chien, “Improvements in patterning quality and fidelity in plasmonic lithography incorporating optical proximity correction”. Optics and Laser Technology 174, 110653 (2024). (IF 5.00, Rank 18% in Optics)
7. C. K. Chang*, and C. W. Yang, “Retrieving profile of photoresist with high aspect ratio and subwavelength features using optical spectroscopy and artificial neural network”. Optics Express 32(5), 8389-8396 (2024). (IF 3.8, Rank 30% in Optics)
Conference Papers (* corresponding author)
C. H. Wei, and C. K. Chang*, “Generation of optical vortex by plasmonic metalens for beam shaping,” The 12th International Conference on Metamaterials, Photonic Crystals and Plasmonics (META 2022), Paper ID 1738, Torremolinos, Spain (19-22 July 2022).
傳 真
886-6-2352973
地 址
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